Optical Measurement System

Integrating Chinese Technology with American Ideals

Optical Measurement System
For Ultra-fine Microstructures

Introduction

This technolog is an optical system for measuring samples which have submicrometer microstructures. The system is based on a confocal scanning microscopic system.

Our Technology

The system not only has the advantages of conventional optic measurement systems, inluding non-contact measurement resulting in no damage to the sample, but its resolution ability may exceed the diffraction limit.

Benefits of this Technology

Some applications of this technology include:

Optical disk surface profiles

Measurement of integrated circuits with submicrometer line width

Some measurement of biological samples

Testing when submicrometer and nanometer measurement precision is required

This Technology is Available for Transfer

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